Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data.The journal is focussed on all aspects of:-nano- and micro- mechanical systems-nano- and micro- electomechanical systems-nano- and micro- electrical and mechatronic systems-nano- and micro- engineering-nano- and micro- scale sciencePlease note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering.Below are some examples of the topics that are included within the scope of the journal:-MEMS and NEMS:Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc.-Fabrication techniques and manufacturing:Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing.-Packaging and Integration technologies.-Materials, testing, and reliability.-Micro- and nano-fluidics:Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip.-Lab-on-a-chip and micro- and nano-total analysis systems.-Biomedical systems and devices:Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces.-Energy and power:Including power MEMS/NEMS, energy harvesters, actuators, microbatteries.-Electronics:Including flexible electronics, wearable electronics, interface electronics.-Optical systems.-Robotics.
微机械与微工程杂志（JMM）主要报道实验工作，但相关的建模论文也会被考虑，并得到实验数据的支持。该杂志关注以下各个方面：-纳米和微-机械系统-纳米和微-机电系统-纳米和微-机电系统-纳米和微工程-纳米和微尺度科学请注意，我们不发表与纳米或微工程没有明显应用或联系的材料论文。以下是一些包含在该杂志范围内的主题示例：-MEMS和NEMS：包括传感器、光学MEMS/NEMS、RF MEMS/NEMS等。-制造技术和制造：包括微机械加工、蚀刻、光刻、沉积、图案化、自组装、3D打印、喷墨打印。封装和集成技术。-材料、测试和可靠性。-微流控和纳米流控：包括光流控、声流控、液滴、微反应器、芯片上的器官。芯片实验室和微纳米全分析系统。-生物医学系统和设备：包括生物MEMS、生物传感器、分析、芯片上器官、药物输送、细胞、生物界面。能源和电力：包括电力MEMS/NEMS、能量采集器、执行器、微电池。电子：包括柔性电子、可穿戴电子、接口电子。光学系统。机器人学。
Rapid and inexpensive method for fabrication of multi-material multi-layer microfluidic devices
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AAF25A
Characterization of polymer-based piezoelectric micromachined ultrasound transducers for short-range gesture recognition applications
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB1F41
Piezoresistive strain sensor based on monolayer molybdenum disulfide continuous film deposited by chemical vapor deposition
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB0726
Fabrication of micro-scale radiation shielding structures using tungsten nanoink through electrohydrodynamic inkjet printing
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB3B26
Sensing strategies in wearable bio-mechanical systems for medicine and sport: a review
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB2F24
Effect of circuit phase delay on bias stability of MEMS gyroscope under force rebalance detection and self-compensation method
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB27E8
Hydrodynamic channeling as a controlled flow reversal mechanism for bidirectional AC electroosmotic pumping using glassy carbon microelectrode arrays
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB1D9F
Development of an impedance-based interdigitated biochemical sensor using a multiuser silicon process
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB078F
Electrical surface charge patterns induced by droplets sliding over polymer and photoresist surfaces
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB3182
On-ratio PDMS bonding for multilayer microfluidic device fabrication
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB341E
Experimental study on micromilling of thin walls
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AAEECB
A novel capacitive micro-accelerometer made of steel using micro wire electrical discharge machining method
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB4E41
Acoustic power transfer for biomedical implants using piezoelectric receivers: effects of misalignment and misorientation
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB257F
Highly sensitive and flexible strain sensor based on Au thin film
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AAEBE4
MEMS thermal gas flow sensor with self-test function
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/ab4aef
Multimode excitations for complex multifunctional logic device
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/ab4dfc
High-yield indium-based wafer bonding for large-area multi-pixel optoelectronic probes for neuroscientific research
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB2A53
Metallized SU-8 thin film patterns on stretchable PDMS
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB307F
In situ thermo-mechanical bending behavior of VO2 microcantilevers across the phase transition
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AAEAB5
Making thick photoresist SU-8 flat on small substrates
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AAED1C
Deposited poly-Si as on-demand linewidth compensator for on-chip Fabry–Perot interferometer and vertical linear variable optical filter bandpass and passband manipulation
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB035C
A bionic micro-electromechanical system piezo-resistive vector hydrophone that suppresses vibration noise
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB3DD1
Ultrasonic welding for the rapid integration of fluidic connectors into microfluidic chips
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB10D2
Fabrication of Fabry–Perot-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AAF6CB
Droplet-jet mode near-field electrospinning for controlled helix patterns with sub-10 µm coiling diameter
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB025E
Vibrational modes in MEMS resonators
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/ab4bad
A novel impedance sensing approach for precise electromechanical characterization of cells
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB38FC
Numerical analysis and experiment of high-efficiency long-term PDMS open-surface mixing chip
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB145F
Intrinsic stress-induced bending as a platform technology for controlled self-assembly of high-Q on-chip RF inductors
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB16BD
Microfluidic device for generating regionalized concentration gradients under a stable and uniform fluid microenvironment
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AAF029
Fabrication of ultrahigh-aspect-ratio and periodic silicon nanopillar arrays using dislocation lithography and deep reactive-ion etching
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB3749
Theoretical and experimental studies of electrostatic focusing for electrohydrodynamic jet printing
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB0C65
Capacitive micromachined ultrasonic transducers for transmitting and receiving ultrasound in air
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/ab4e00
Uniformity improvement of deep silicon cavities fabricated by plasma etching with 12 inch wafer level
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB3602
Flow-induced synthesis of polystyrene-block-poly(ethylene glycol) vesicles on the interface of a laminated microflow
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB0237
Investigation of parallel-connected MEMS electrostatic energy harvesters for enhancing output power over a wide frequency range
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB284D
Comparison of Al and Cu masks used for patterning boron-doped diamonds in oxygen plasma
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/ab4d6f
A CMUT-based gas density sensor with high sensitivity
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB3BFA
Step and scanning lithography for patterning seamless microstructures on the inner surface of a hollow roller
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB38F1
Micromechanical vibration absorber for frequency stability improvement of DETF oscillator
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB0364
Experimental study of current density in copper filling process within deep Through-Silicon Vias with high aspect ratio
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/ab3f3e
A 37-actuator polyimide deformable mirror with electrostatic actuation for adaptive optics microscopy
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB2370
Array of 3D permanent micromagnet for immunomagnetic separation
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB259F
Dynamics of a Pair of Ellipsoidal Microparticles under a Uniform Magnetic Field
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB3432
Investigation on gate dielectric material using different optimization techniques in carbon nanotube field effect transistors (CNFETs)
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB2A61
A factorial design approach to fracture pressure tests of microfluidic BF33 and D263T glass chips with side-port capillary connections
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AAFE5B
A simple edge-following scanning algorithm for proton beam writing and other direct-write lithographies
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AAFA03
Fabrication of high aspect ratio structures in silicon independent of crystal orientation using metal assisted etching
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB1982
Millipixel image correlation for sub nm measurement of MEMS motion
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/ab3ede
High temperature-assisted electrohydrodynamic jet printing of sintered type nano silver ink on a heated substrate
来源期刊：Journal of Micromechanics and MicroengineeringDOI：10.1088/1361-6439/AB0739
