The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.
感兴趣的主题包括但不限于：尺寸范围从微米到毫米的器件、IC兼容制造技术、其他制造技术、微观现象的测量、理论结果、新材料和设计、微致动器、微机器人、微电池、轴承、磨损、可靠性、电互连、微远程操纵以及适用于MEMS的标准。在流体学、光学、生物医学工程等中的应用实例和面向应用的装置，也是人们关心的中心问题。
Resonant Microelectromechanical Receiver
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2898984
A Resonant MEMS Accelerometer With 56ng Bias Stability and 98ng/Hz1/2 Noise Floor
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2908931
Utilizing Energy Localization in Weakly Coupled Nonlinear Resonators for Sensing Applications
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2894953
Piezoelectric Pressure Sensors for Hypersonic Flow Measurements
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2899266
Analysis of Thermally Actuated RF-MEMS Switches for Power Limiter Applications
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2018.2881128
High-Accuracy Ultrasonic Rangefinders via pMUTs Arrays Using Multi-Frequency Continuous Waves
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2912869
Precision Plating of Human Electrogenic Cells on Microelectrodes Enhanced With Precision Electrodeposited Nano-Porous Platinum for Cell-Based Biosensing Applications
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2018.2879577
Study of Energy Loss Mechanisms in AlN-Based Piezoelectric Length Extensional-Mode Resonators
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2913875
Design and Modeling of Piezoelectrically Driven Micro-Actuator With Large Out-of-Plane and Low Driving Voltage for Micro-Optics
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2935007
Capacitive MEMS Accelerometer With Perforated and Electrically Separated Mass Structure for Low Noise and Low Power
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2903349
Highly-Linear Magnet-Free Microelectromechanical Circulators
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2947903
A CMOS-Integrated MEMS Platform for Frequency Stable Resonators-Part I: Fabrication, Implementation, and Characterization
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2936149
Theoretical Modeling, Numerical Simulations and Experimental Study of Micro Thermal Convective Accelerometers
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2930065
Development of 3D Fused Quartz Hemi-Toroidal Shells for High-Q Resonators and Gyroscopes
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2945713
A Two-Terminal Bistable Electrothermally Actuated Microswitch
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2904997
A Multifunctional Smart Soft Contact Lens Device Enabled by Nanopore Thin Film for Glaucoma Diagnostics and In Situ Drug Delivery
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2927232
Ultra-Thick Electroplated CoPt Magnets for MEMS
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2018.2888846
Formation, Evolution, and Tuning of Frequency Combs in Microelectromechanical Resonators
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2898003
Shape Memory Alloy Actuators for Silicon Microgrippers
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2936288
Semi-Packed Gas Chromatography Columns With Density Modulated Pillars
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2018.2881532
Extended Design Space of Silicon-on-Nothing MEMS
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2927466
T-Shaped Piezoelectric Structure for High-Performance MEMS Vibration Energy Harvesting
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2942291
An Adjustable Magnetic Preloading and Stepping Controlled Piezoelectric Traveling-Wave Ultrasonic Micromotor
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2018.2889864
Manipulation of Liquid Metal Inside an SEM by Taking Advantage of Electromigration
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2018.2878320
Focusing of Airborne Particles Using Groove-Induced Envelope (GRIP) Flow Air-Microfluidic Concentrator
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2898630
Design, Fabrication, and Characterization of Bimorph Micromachined Harvester With Asymmetrical PZT Films
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2920213
Feasibility Studies on Nafion Membrane Actuated Micropump Integrated With Hollow Microneedles for Insulin Delivery Device
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2939189
A CMOS-Integrated MEMS Platform for Frequency Stable Resonators—Part II: Design and Analysis
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2936146
Highly Accurate Airflow Volumetric Flowmeters via pMUTs Arrays Based on Transit Time
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2916987
Batch Fabrication of Miniaturized Ag/AgCl Reference Electrode With Ion Exchanging Micro-Nano-Pores by Silicon-Base Double-Side Anisotropic Etching Process
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2936651
MEMS-Based AlScN Resonating Energy Harvester With Solidified Powder Magnet
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2945550
Fabrication of Phase Change Microstring Resonators via Top Down Lithographic Techniques: Incorporation of VO2/TiO2 Into Conventional Processes
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2931805
CMOS Closed-Loop Control of MEMS Varactors for Robust Ka-Band Tunable Filters
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2929469
Symmetric LC Circuit Configurations for Passive Wireless Multifunctional Sensors
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2901818
Etching Mechanisms of SiO2 and SiNx:H Thin Films in HF/Ethanol Vapor Phase: Toward High Selectivity Batch Release Processes
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2918738
Multiscale Fluidic Channels via Internal Oxidation and Oxide Etching of Self-Assembled Silicon-on-Nothing Structures
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2926378
Optically Accessible MEMS Resonant Mass Sensor for Biological Applications
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2906586
CMOS Compatible Hermetic Packages Based on Localized Fusion Bonding of Fused Silica
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2913533
MEMS Tunable Photonic Crystal-Cantilever Cavity
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2936450
Thick High Aspect-Ratio Biomimetic Silicon Hair Sensors as Accelerometers
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2018.2884524
A Novel Indirect Quasi-Static Actuation Concept for 2D MEMS Micromirrors
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2897755
A Technique for Estimation of Residual Stress and Young’s Modulus of Compressively Stressed Thin Films Using Microfabricated Beams
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2948016
A Shear-Stress Sensor for Hypersonic Flow Measurement
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2899256
Continuous Single-Phase Flow-Assisted Isolation for Parallel Observation of Reactions Between Deterministically Paired Particles
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2927885
Bending Deformation of Multiple Aligned Plates Toward Coalescence Induced by Capillarity
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2913012
Real-Time Monitoring for Knee Extensor Muscle Training With Flexible Sensors
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2941939
A Passive Wireless Switching Array Based on MEMS Switches
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2938545
Thermoformed Liquid Crystal Polymer Packages for Magnetoelastic Frame-Suspended Resonators
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2904711
Thermally Reflowed Die-Attached Linear Variable Optical Filter for Mid-Infrared Volatile Organic Compounds Detection
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2936006
Development and Modeling of a Wafer-Level BCB Packaging Method for Capacitive RF MEMS Switches
来源期刊：Journal of Microelectromechanical SystemsDOI：10.1109/JMEMS.2019.2912745
